✦ LIBER ✦
5084. Film thickness uniformity of sputter deposited layers-comparison between calculation and practical results: G Deppisch Vakuum Technik, 30 (4), 1981, 106–115 (in German)
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 140 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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