✦ LIBER ✦
5026. Variations in the stoichiometry of thin oxides on silicon as seen in the Si LVV Auger spectrum: H S Wildman et al, J Vac Sci Technol, 18 (3), 1981, 955–959
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 175 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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