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50 nm continuously tunable MEMS VCSEL devices with surface micromachining operating at 1.95 µm emission wavelength

✍ Scribed by Gruendl, Tobias; Zogal, Karolina; Debernardi, Pierluigi; Gierl, Christian; Grasse, Christian; Geiger, Kathrin; Meyer, Ralf; Boehm, Gerhard; Amann, Markus-Christian; Meissner, Peter; Kueppers, Franko


Book ID
121493813
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
578 KB
Volume
28
Category
Article
ISSN
0268-1242

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