✦ LIBER ✦
4969. Ion implanted species dependence in silicon oxidation: R A Collins et al, Rad Effects, 58 (3), 1981, 103–108
- Book ID
- 103464711
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 173 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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