✦ LIBER ✦
4967. Detection of residual damage in 75As implanted silicon single crystal by secondary ion mass spectrometry: A C Yen, J Vac Sci Technol, 18 (3), 1981, 895–898
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 173 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0042-207X
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