✦ LIBER ✦
4929081 System for detecting defects in a regularly arranged pattern such as an integrated circuit or the like
✍ Scribed by Yoko Yamamoto; Hitoshi Tanaka; Noboru Mikami
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 177 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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