✦ LIBER ✦
4908226 Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams
✍ Scribed by Randall Kubena; ThomasM Mayer
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 184 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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