4490208 Method of producing thin films of silicon: Kazunobu Tanaka, Akihisa Matsuda, Toshihiko Yoshida, Ibaraki, Japan assigned to Agency of Industrial Science and Technology

• Book ID: 103469302
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 206 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90611-6