4395433 Method for manufacturing a semiconductor device having regions of different thermal conductivity

✍ Scribed by Yoshihide Nagakubo; Susumu Kohyama

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 153 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)90875-8