✦ LIBER ✦
4134. Inspection for defects of a mask containing one- to submicrometer patterns using a scanning electron microscope and feature extraction method. (USA)
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 134 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0042-207X
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