✦ LIBER ✦
4125. Design aspects of a scanning electron-beam-microfabrication instrument having 10 × 10 mm field coverage, normal substrate incidence and high throughput. (USA)
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 178 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.