𝔖 Bobbio Scriptorium

✦ LIBER ✦

4124. Method of optimizing registration signals for electron-beam microfabrication. (USA)

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 178 KB
Volume: 29
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(79)90234-3

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