✦ LIBER ✦
4040. Argon plasma bridge neutralizer operation with a 10 cm beam diameter ion etching source. (USA): P D Reader et al, J Vac Sci Technol, 15 (3), 1978, 1093–1095
- Book ID
- 108389946
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 143 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0042-207X
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