✦ LIBER ✦
402. Investigation of results of implantation of p-type single silicon crystals by phosphorus ions with energy up to 50 keV: V Zhuk et al, Proc Int Work Conf on Ion Implant in Semicon, Rossendorf 1972, 197–200 (in Russian).
- Publisher
- Elsevier Science
- Year
- 1974
- Tongue
- English
- Weight
- 155 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0042-207X
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