3D Orientation Microscopy : Electron Backscatter Diffraction in a Combined FIB/SEM

✍ Scribed by Stuart I. Wright; Stefan Zaefferer

• Publisher: Wiley (John Wiley & Sons)
• Year: 2007
• Weight: 468 KB
• Volume: 9
• Category: Article
• ISSN: 1439-4243
• DOI: 10.1002/imic.200790209

✦ Synopsis

Combining electron backscatter diffraction (EBSD), a scanning electron microscope (SEM) and a focused ion beam (FIB) together into a single instrument enables three dimensional (3D) characterization of microstructure in crystalline materials. Combining these techniques together has enormous potential in materials science.