✦ LIBER ✦
3881. Simple vacuum gauge using TaN thin films in the pressure range of 105 to 103 Pa. (USA) Pa. (USA)
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 138 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0042-207X
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