3802. The hydrogen content of plasma-deposited silicon nitride. (USA): W A Lanford and M J Rand, J appl Phys, 49 (4), 1978, 2473–2477

• Book ID: 114092849
• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 144 KB
• Volume: 29
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(79)80283-3