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3780. The electron temperature in a medium-pressure radio-frequency flowing positive column plasma. (USA): Jen-Shih Chang, J appl Phys 49 (3), 1978, 1287–1288


Book ID
114092827
Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
150 KB
Volume
29
Category
Article
ISSN
0042-207X

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