✦ LIBER ✦
368. Cathode sputtering in inert gas glow discharges: B. J. Stocker, Brit. J. Appl. Phys., 12 (9), Sept. 1961, 465–468
- Publisher
- Elsevier Science
- Year
- 1962
- Tongue
- English
- Weight
- 139 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0042-207X
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