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3-D self-assembling and actuation of electrostatic microstructures

✍ Scribed by Quevy, E.; Buchaillot, L.; Collard, D.

Book ID: 114538802
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 171 KB
Volume: 48
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.936715

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