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2D nano/micro hybrid patterning using soft/block copolymer lithography

✍ Scribed by Dae-Geun Choi; Hyung Kyun Yu; Seung-Man Yang

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
333 KB
Volume
24
Category
Article
ISSN
0928-4931

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## Abstract Hierarchical micro/nano self‐assembled 2D structures on thin films of block copolymers/Fe hybrid materials were induced on Si/Ta substrates, either by wet chemistry or laser vacuum ultraviolet (VUV) light at 157 nm. Formation of either lamellas or micelles depends on the diblock copolym