264. Diffusion furnaces for semiconductor processing: R P Donovan and R M Burger, Semicond Prod Solid State Techn, 10 (10), 1967, 40–49

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 151 KB
• Volume: 18
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(68)91467-x