✦ LIBER ✦
2226. Backscattering analysis of the composition o silicon-nitride films deposited by rf reactive sputtering: C J Mogab and E Lugujjo,J Appl Phys, 47 (4), 1976, 1302–1309
- Publisher
- Elsevier Science
- Year
- 1976
- Tongue
- English
- Weight
- 159 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0042-207X
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