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2.15 Microscopic examination of thin films by means of the Nomarski contrast method

✍ Scribed by U Mutze


Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
158 KB
Volume
17
Category
Article
ISSN
0042-207X

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In this paper the sensing properties of Sn0 2 thin films, grown by the RGTO (rheotaxial growth and thermal oxidation) technique, towards low concentrations of H 2 S (100ppb-10ppm) are described . The RGTO method allows us to prepare thin films with a wrinkled surface, which is suitable for the dispe