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2142. Treating and passivating vacuum systemsand components in cold cathode discharges: L Holland,Vacuum,26 (3), 1976, 97–103


Book ID
103467724
Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
163 KB
Volume
26
Category
Article
ISSN
0042-207X

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Treating and passivating vacuum systems
✍ L Holland 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 774 KB

The uses of cold cathode discharges in inert and active gases for improving the vacuum characteristics of systems and components are reviewed with the objective of analysing the processes which occur under the various complex conditions of treatment. Initially the effects and practical problems are