Automatic alignment problem was coupled with the numerical coordinates on a machine, a vision system and wafer device. This paper proposes a method for constructing a general model for automatic alignment and formulating equations from three coordinates. The algorithm was derived under the assumptio
โฆ LIBER โฆ
2-D FFT algorithm by matrix factorization in a 2-D space
โ Scribed by M. Wang; E. B. Lee
- Publisher
- Springer US
- Year
- 1994
- Tongue
- English
- Weight
- 554 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0923-6082
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