1ƒ noise as an electromigration characterization tool for W-plug vias between TiN/AlCu/TiN metallizations

✍ Scribed by Z. Çelik-Butler

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 486 KB
• Volume: 39
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(95)00411-4