✦ LIBER ✦
1D Simulation of Oxidation-Enhanced and Oxidation-Retarded Diffusion in Silicon and Validity of the Physical Model. Transition to the 2D Case
✍ Scribed by Scheid, E. ;Chenevier, P.
- Publisher
- John Wiley and Sons
- Year
- 1986
- Tongue
- English
- Weight
- 621 KB
- Volume
- 93
- Category
- Article
- ISSN
- 0031-8965
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