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1971 International cryogenics exibition and conferences

Publisher: Elsevier Science
Year: 1971
Tongue: English
Weight: 609 KB
Volume: 21
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(71)91009-8

No coin nor oath required. For personal study only.

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Source is available. It contains data showing film thickness distribution and deposition rates obtained with the Orbitorr. Theory of operation and the unique ability of the Orbitorr to achieve high target utilization efficiency are also described.