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1803. Pumping speed and the current of sputter-ion pumps in the region of low pressures: E M Rudnitskiy, Pribory Tekh Eksper, 12 (3), May–June 1967, 127–129 (in Russian)


Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
169 KB
Volume
17
Category
Article
ISSN
0042-207X

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