1797. Thin film thickness measurements during vacuum processing: O M Sorokin and D I Dzhioeva, Pribory Tekh Eksp, 11 (2), Mar-Apr 1966, 187–190 (in Russian)

• Book ID: 103447429
• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 130 KB
• Volume: 16
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(66)92100-2