1786. Thin film fabrication—the low energy sputtering method: J Nickerson, Electronic Packaging and Production, 6, 1966, 54–57

• Book ID: 107868521
• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 132 KB
• Volume: 16
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(66)92089-6