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1713. A mass spectrometer analysis of the residual atmosphere which results from cleaning the substrate in a conventional evaporator by means of a high frequency discharge: A H Gregg and D J Reid, Le Vide, 122, 1966, 171–176 (in French)


Publisher
Elsevier Science
Year
1966
Tongue
English
Weight
138 KB
Volume
16
Category
Article
ISSN
0042-207X

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