✦ LIBER ✦
1670. Selecting vacuum equipment for thethin-film processing line. II. Diffusion ion pumped systems: A L Hobson, Electronic Packaging and Production, 6, 1966, 34–39
- Publisher
- Elsevier Science
- Year
- 1966
- Tongue
- English
- Weight
- 139 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0042-207X
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