✦ LIBER ✦
1618. Method of measuring the thickness of a dielectric deposited on a conducting substrate in a vacuum chamber: V P Derkach, USSR Patent 203930, Sppl 19th Nov 1962, pub 25th Dec 1967 (in Russian).
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 151 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0042-207X
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