1517. Utilization of ion beams and high-frequency discharge for the deposition of dielectric and metal films: K A Osipov et al, Neorg Mater, 7 (6), 1971, 1051–1052 (in Russian)

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 294 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)90331-9