1506. The mechanism of formation of the ion component in the cathodic sputtering of metals: V I Veksler and B A Tsipinyuk, Zh Eksper Teor Fiz, 60 (4), April 1971, 1393–1398 (in Russian)

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 289 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)90320-4