✦ LIBER ✦
14N depth distribution measurements for ultrathin dielectric films on silicon (100)
✍ Scribed by H.T. Tang; W.N. Lennard; L.C. Feldman; M.L. Green; D. Brasen
- Book ID
- 113287110
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 518 KB
- Volume
- 108
- Category
- Article
- ISSN
- 0168-583X
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