149. An apparatus for vacuum sputtering: K V Borodkin et al, USSR Patent No 295829, appl 30th January 1969, publd 20th January 1971

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 148 KB
• Volume: 23
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(73)91584-4