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1388. Constructional characteristics of an electrode system for producing thin films by cathodic sputtering: R V Dashtoyan, Mezh Sb Nauch Tr Erevan Politekh Inst, Radiotekh i Elektron, No. 1, 1974, 77–78


Book ID
103464851
Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
171 KB
Volume
25
Category
Article
ISSN
0042-207X

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