✦ LIBER ✦
1373. Development of a dc sputtering unit for the production of GaAs devices: J Engemann, Rev Sci Instrum, 46 (5), 1975, 547–549
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 181 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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