✦ LIBER ✦
1365. Automatic monitoring of deposition conditions during rf sputtering of dielectric materials: C W Pitt et al, Vacuum, 25 (6), 1975, 265–271
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 175 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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