✦ LIBER ✦
1328. Influence of directed action of ions on the target in an apparatus for high-energy sputtering: M Lukaszewicz, Pr Nauk Inst Technol Elektron Polytech Wrocl, No 10, 1973, 149–155 (in Polish)
- Publisher
- Elsevier Science
- Year
- 1974
- Tongue
- English
- Weight
- 143 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0042-207X
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