1301. Heavy-ion sputtering yield of silicon: H H Anderson and H L Bay, J Appl Phys, 46 (5), 1975, 1919–1921

• Book ID: 103466138
• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 170 KB
• Volume: 25
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(75)90568-0