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1291. Structural and electrical properties of films sputtered from a Pt cathode in argon-oxygen mixtures: C D Bennewitz et al, J Appl Phys, 46 (2), 1975, 558–567


Book ID
103466128
Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
215 KB
Volume
25
Category
Article
ISSN
0042-207X

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