✦ LIBER ✦
1275. A multiposition substrate holder: A I Belyakov et al,Soviet Patent, class C 23 c 13/08, H 05 k, 13/04, No. 417542, claimed 6 January 1972, publd 22 July 1974 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 155 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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