✦ LIBER ✦
123. Commercial ellipsometer and investigation of the kinetics of oxide films on silicon: A N Sedov et al, New Semiconductor Technol Coll, Voronezh Univ 1971, 120–125 (in Russian)
- Book ID
- 103462228
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 131 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0042-207X
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