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1220. Analysis of thin surface layers and impurity profiles by back-scattering and channeling of MeV helium ions: J Gyulai et al, International Conf Phys Chem Semiconductors HeterojunctionsLayer Structure, Vol 5, No 5, Akademia Kiado Budapest 1971 293–301


Publisher
Elsevier Science
Year
1972
Tongue
English
Weight
137 KB
Volume
22
Category
Article
ISSN
0042-207X

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