✦ LIBER ✦
1218. Efficient sputtering in a cold-cathode discharge in magnetron geometry: K Wasa and S Hayakawa, Proc IEEE, 55 (12), Dec 1967, 2179–2180
- Book ID
- 103453238
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 141 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0042-207X
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