✦ LIBER ✦
120-nm lithography using off-axis TIR holography and 364 nm exposure wavelength
✍ Scribed by M. Barge; S. Bruynooghe; F. Clube; A. Nobari; J.-L. Saussol; E. Grass; H. Mayer; B. Schnabel; E.-B. Kley
- Book ID
- 114155246
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 462 KB
- Volume
- 57-58
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.